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工艺装备日本已授权

Film inspection method

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申请人エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド
发明人トーマス・イー・フィスク
公开号JP6509734B2
授权号JP6509734B2
申请日2013-10-31
公开日2019-05-08
授权日2019-05-08

摘要

A reflected light measurement method for detecting discontinuities in a chemical vapor deposition (CVD) film, comprising: Providing a thermoplastic plastic container wall having an outer surface, an inner surface and a CVD coating on at least one of the inner surface and the outer surface, the …

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