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Broadband radiation source device, metrology device, and method for generating …

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申请人荷蘭商Ａｓｍｌ荷蘭公司

发明人約翰柯林崔佛斯

公开号TWI813007B

授权号TWI813007B

申请日2021-08-25

公开日2023-08-21

授权日2023-08-21

摘要

A broadband radiation source device, comprising a fiber assembly comprising a plurality of optical fibers, each optical fiber being filled with a gas medium; wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving …

Broadband radiation source device, metrology device, and method for generating &hellip;

摘要

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Broadband radiation source device, metrology device, and method for generating …